JPH0317948Y2 - - Google Patents

Info

Publication number
JPH0317948Y2
JPH0317948Y2 JP1985196531U JP19653185U JPH0317948Y2 JP H0317948 Y2 JPH0317948 Y2 JP H0317948Y2 JP 1985196531 U JP1985196531 U JP 1985196531U JP 19653185 U JP19653185 U JP 19653185U JP H0317948 Y2 JPH0317948 Y2 JP H0317948Y2
Authority
JP
Japan
Prior art keywords
electrode plate
dust collection
dust
dust collecting
section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1985196531U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62106641U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985196531U priority Critical patent/JPH0317948Y2/ja
Publication of JPS62106641U publication Critical patent/JPS62106641U/ja
Application granted granted Critical
Publication of JPH0317948Y2 publication Critical patent/JPH0317948Y2/ja
Expired legal-status Critical Current

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  • Electrostatic Separation (AREA)
JP1985196531U 1985-12-23 1985-12-23 Expired JPH0317948Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985196531U JPH0317948Y2 (en]) 1985-12-23 1985-12-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985196531U JPH0317948Y2 (en]) 1985-12-23 1985-12-23

Publications (2)

Publication Number Publication Date
JPS62106641U JPS62106641U (en]) 1987-07-08
JPH0317948Y2 true JPH0317948Y2 (en]) 1991-04-16

Family

ID=31155438

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985196531U Expired JPH0317948Y2 (en]) 1985-12-23 1985-12-23

Country Status (1)

Country Link
JP (1) JPH0317948Y2 (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2627575B2 (ja) * 1990-08-15 1997-07-09 高砂熱学工業株式会社 半導体製造用クリーンルームの海塩粒子汚染防止方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5143317B2 (en]) * 1972-10-09 1976-11-20
JPS5438046U (en]) * 1977-07-13 1979-03-13

Also Published As

Publication number Publication date
JPS62106641U (en]) 1987-07-08

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